JPH06454Y2 - スタンパー洗浄用電解脱脂装置 - Google Patents
スタンパー洗浄用電解脱脂装置Info
- Publication number
- JPH06454Y2 JPH06454Y2 JP9106688U JP9106688U JPH06454Y2 JP H06454 Y2 JPH06454 Y2 JP H06454Y2 JP 9106688 U JP9106688 U JP 9106688U JP 9106688 U JP9106688 U JP 9106688U JP H06454 Y2 JPH06454 Y2 JP H06454Y2
- Authority
- JP
- Japan
- Prior art keywords
- stamper
- electrode
- electrolytic solution
- electrolytic
- rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005238 degreasing Methods 0.000 title claims description 18
- 238000004140 cleaning Methods 0.000 title claims description 11
- 239000008151 electrolyte solution Substances 0.000 claims description 22
- 238000005868 electrolysis reaction Methods 0.000 claims description 10
- 230000002093 peripheral effect Effects 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000000243 solution Substances 0.000 claims description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000000428 dust Substances 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 230000001186 cumulative effect Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 238000004945 emulsification Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000007127 saponification reaction Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Manufacturing Optical Record Carriers (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9106688U JPH06454Y2 (ja) | 1988-07-08 | 1988-07-08 | スタンパー洗浄用電解脱脂装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9106688U JPH06454Y2 (ja) | 1988-07-08 | 1988-07-08 | スタンパー洗浄用電解脱脂装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0214370U JPH0214370U (en]) | 1990-01-29 |
| JPH06454Y2 true JPH06454Y2 (ja) | 1994-01-05 |
Family
ID=31315561
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9106688U Expired - Lifetime JPH06454Y2 (ja) | 1988-07-08 | 1988-07-08 | スタンパー洗浄用電解脱脂装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06454Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013071062A (ja) * | 2011-09-28 | 2013-04-22 | Toho Technology Corp | 蒸着マスク洗浄装置、蒸着マスク洗浄システムおよび蒸着マスク洗浄方法 |
-
1988
- 1988-07-08 JP JP9106688U patent/JPH06454Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0214370U (en]) | 1990-01-29 |
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